Session: MR-03-02 - Compliant Mechanisms (A. Midha Symposium)

Paper Number: 88448

88448 - Design and Analysis of a Piezo-Driven Precision Positioning Stage Suitable for Xbpm 

X-ray beam position monitor (XBPM) is an indispensable device in the fourth-generation synchrotron light sources. However, the vacuum precision positioning stage for key components in advanced light sources has received scant attention. Aiming at the high positioning accuracy and simplicity of location adjustment of XBPM, a stacked piezo-driven precision positioning stage is proposed in this paper. The stage configuration is decoupled, which can realize independent translations in X and Z directions. The overall mechanism is non-closed and the selection of material and actuator in special occasion is focused, which is suitable for general and ultra-high vacuum system. In addition, the static and dynamic characteristics of the precision positioning stage are verified with finite element analysis (FEA), and the prototype test system is built. The experimental results indicate that the workspace under closed-loop control is 51.39 μm × 35.07 μm, which is almost consistent with the simulation value. Furthermore, the output displacement linearity, the maximum coupling motion error, and actual resolution of the stage are also assessed. In particular, the impact of environmental fluctuation on actual resolution is quantitatively evaluated. Based on the test and simulated results, the designed stage achieves the expected performances and can meet the demands of micro-nano positioning precision and motion decoupling of XBPM.

Presenting Author: Xuefeng Yang China University of Mining and Technology

Presenting Author Biography: Xuefeng Yang received the Ph.D. degree in mechanical design and theory from the School of Mechatronic Engineering, China University of Mining and Technology (CUMT), Xuzhou, China, in 2009.He is currently an associate professor at the school of mechanical engineering, China University of Mining and Technology. His research interests include design and application of MEMS, stray current corrosion monitoring and prevention, Intelligent detection and information processing.

Authors:

Xuefeng Yang China University of Mining and Technology
Xu Cui China University of Mining and Technology
Mengchen Zhang China University of Mining and Technology
Jian Zhuang Spallation Neutron Source Science Center (SNSSC)