Session: MNS-01-02: Dynamics of MEMS/NEMS 2nd Session

Paper Number: 90568

90568 - A Novel Mass Sensor Based on Parametrically Excited Mode-Localized Resonators 

The nonlinear dynamics in micro/nano electromechanical sensor have attracted a myriad of
attention of researchers due to its great potential to improve sensors’ performances like
sensitivity, resolution and signal to noise ratio. In this paper, a novel mass sensor exploiting
the bifurcation phenomenon in parametrically excited mode-localized resonators is proposed.
The mathematical model is established by Euler-Bernoulli theory and solved by the method of
multiple scales (MMS). Meanwhile, the harmonic balance method (HBM) combined with
asymptotic numerical method (ANM) is utilized for validation. The dynamics and bifurcation
topology of the coupled mass sensor are investigated and the potential bifurcation point for
mass sensing on is explored and determined. By using the long-time integrating method, the
temporal response near the pitchfork bifurcation points are determined. Compared to relative
shift of frequency, the sensitivity in terms of relative shift of amplitude ratio can be enhanced
by 4 orders of magnitude. Finally, the effects of coupling voltage are studied which shows that
the sensitivity can be further improve with the decrease of coupling voltage above the mode
aliasing. Moreover, the effects of coupling voltage on pitchfork bifurcation point and sensitivity
are investigated which enables the derivation of design rules to avoid mode aliasing.

Presenting Author: Jian Zhao Dalian University of Technology

Presenting Author Biography: Jian Zhao (Member, IEEE) received the B.S., M.S., and Ph.D. degrees in mechanical engineering<br/>in 2003, 2006, and 2008, respectively. He had been a Research Scientist with the Mechatronics<br/>Department, Johannes Kepler University Linz, Austria, from 2008 to 2009. He is currently a Full<br/>Professor at the School of Automotive Engineering, Dalian University of Technology. He was<br/>granted 30 Chinese patents, and has published over 50 technological articles in a wide variety<br/>of MEMS fields, including intelligent structures, compliant mechanisms, mass sensors, shock<br/>sensors, and acceleration switches. His current research interests include nonlinear MEMS<br/>sensors, compliant mechanics, multi-stable mechanisms, and nonlinear dynamics. He received<br/>the Excellent Ph.D. Graduate Award in Xidian University.

Authors:

Jiahao Song Dalian University of Technology
Jian Zhao Dalian University of Technology
Najib Kacem Univ. Bourgogne Franche-Comté, FEMTO-ST Institute
Ming Lyu Dalian University of Technology
Rongjian Sun Dalian University of Technology
Pengbo Liu Dalian University of Technology