Session: MNS-01-01: Dynamics of MEMS/NEMS 1st Session

Paper Number: 97855

97855 - Numerical Investigation of Soft-Pad Self-Molding Stamping of Bistable Circular Micro Shells 

A finite elements based methodology, for modeling cold forming of circular bistable metal micro shells, is presented. The fabrication process, which had been reported in a previous publication, is based on pressing a stamp made of a soft foam layer over a thin metallic flat plate which is suspended over a circular cavity in a Si substrate. The finite elements model includes the nonlinear punch layer, the elasto-plastic metal film and their contact interaction. The simulation results are compared to the measured profile of a micro shell, which had been stamped out of an aluminum circular flat plate with thickness of  ̴ 0.4μm and radius of  of  ̴ 425μm. The attempt to achieve correlation between the actually fabricated shell and the prediction of the numerical analysis arises the challenge of uncertain device specific geometric and material properties. Thus, a systematic numerical study is carried out to reveal the role of the various parameters of the forming process including stamping pressure, metal elastic and inelastic material properties and the pre-stamping state of stresses in the working initially flat thin layer. It is found that the fabrication procedure relieves the pre-stamping stresses and that the intensity of the stamping pressure influences the residual shell curvature as well as its shape.

Presenting Author: Rivka Gilat Ariel University

Presenting Author Biography: Rivka Gilat received the B.Sc. degree in civil engineering from Technion, Haifa, and the M.Sc. and Ph.D. degrees in solid mechanics, materials and structures from Tel-Aviv University. She is an Associated Professor with the Department of Civil Engineering, Ariel University. Her research interests include composite materials, structural<br/>modeling, and structural stability.

Authors:

Mark M. Kantor Ariel University
Asaf Asher Tel Aviv University
Rivka Gilat Ariel University
Slava Krylov Tel Aviv University