Session: MNS-01-01: Dynamics of MEMS/NEMS 1st Session

Paper Number: 90565

90565 - Hysteresis Suppression in Coupled Resonators Under Simultaneous Primary and Superharmonic Excitations 

MEMS resonators are becoming more widely used and increasingly miniaturized. It is worth noting that when the vibration amplitude is very small or even lower than the noise floor, the dynamic range will be gradually reduced. For coupled resonators, it is a challenge to increase the nonlinear response amplitude without degrading the frequency stability. In this paper, a general model of two electrostatically coupled resonators subjected to simultaneous primary and superharmonic excitations is developed. And the critical value for pull-in is calculated analytically. A reduced-order model including quadratic and cubic nonlinear terms is generated and the multi-scale method is used to solve the dynamic characteristics and analyze the contribution of the different frequency components to the total response. In addition, to analyze the influence of nonlinear terms on the vibration behaviors, an overall nonlinear coefficient is defined as a function of actuation voltages of Vdc1 and Vac1 . When the system is at the simultaneous superharmonic and primary resonances, the system can exhibit different dynamic characteristics including softening, hardening, and linear behaviors when the overall nonlinear coefficient is tuned to different values. Finally, the conditions for restoring the linear behavior at the highest possible amplitude and suppressing its hysteresis are given, which is important to avoid noise mixing issues.

Presenting Author: Jian Zhao Dalian University of Technology

Presenting Author Biography: Jian Zhao (Member, IEEE) received the B.S., M.S., and Ph.D. degrees in mechanical engineering<br/>in 2003, 2006, and 2008, respectively. He had been a Research Scientist with the Mechatronics<br/>Department, Johannes Kepler University Linz, Austria, from 2008 to 2009. He is currently a Full<br/>Professor at the School of Automotive Engineering, Dalian University of Technology. He was<br/>granted 30 Chinese patents, and has published over 50 technological articles in a wide variety<br/>of MEMS fields, including intelligent structures, compliant mechanisms, mass sensors, shock<br/>sensors, and acceleration switches. His current research interests include nonlinear MEMS<br/>sensors, compliant mechanics, multi-stable mechanisms, and nonlinear dynamics. He received<br/>the Excellent Ph.D. Graduate Award in Xidian University.

Authors:

Ming Lyu Dalian University of Technology
Jian Zhao Dalian University of Technology
Najib Kacem Univ. Bourgogne Franche-Comt´e, FEMTO-ST Institute
Jiahao Song Dalian University of Technology
Rongjian Sun Dalian University of Technology
Pengbo Liu Dalian University of Technology