Session: MNS-02-01: Micro/Nano Bioengineering

Paper Number: 91044

91044 - Frequency Response of Parametric Resonance of Electrostatically Actuated Bio-Mems Circular Membranes 

This paper deals with the amplitude-frequency response of parametric resonance of an electrostatically actuated Bio-MEMS circular membrane. The system consists of a flexible clamped circular membrane over a parallel fixed ground plate. Between the membrane and the ground plate is an alternating current (AC) voltage. The magnitude of the AC voltage is in the range of soft excitation. The AC frequency used to actuate the Bio-MEMS is near the first natural frequency of the membrane. Since the electrostatic force is proportional to the square of the voltage, this actuation leads to parametric resonance of the Bio-MEMS circular plate. Two methods of investigation are utilized in this paper. The method of multiple scales (MMS), and the reduced order model (ROM). The paper also shows the effects of Casimir, Van der Waals, voltage, and damping have on the response of the system The results show that both the Casimir and Van der Waals parameter increase the softening effect of the response, i.e., the response shifts towards lower frequencies and amplitudes. The results also showed that an increase in the damping parameter decreased the escape band of the response while increasing the voltage parameter had the opposite effect of increasing the size of the escape band.

Presenting Author: Dumitru Caruntu University Of Texas Rio Grande Valley

Presenting Author Biography: Dumitru I. Caruntu is ASME Fellow and Professor of Mechanical Engineering Department at The University of Texas Rio Grande Valley. He received his Ph.D. in Mechanical Engineering from Politehnica University of Bucharest, and his MA in Mathematics from the University of Bucharest. Dr. Caruntu is a Professional Engineer. He is ASME Fellow since 2019. He has published in MEMS and NEMS, nonlinear dynamics, vibrations, mathematics and biomechanics. He served as reviewer for Journal of Sound and Vibration, Nonlinear Dynamics, Journal of Vibration and Sound, Communications in Nonlinear Science and Numerical Simulation, Mechanics Research Communications, Medical & Biological Engineering & Computing, Journal of Vibration and Acoustics, ASME IMECE2004-2021, ASME IDETC2007-2021, and ASME DSCC 2009-2020. He is/was Associate Editor for Nonlinear Dynamics; Communications in Nonlinear Science and Numerical Simulation; ASME Journal of Dynamic Systems, Measurements and Control; ASME Journal of Computational and Nonlinear Dynamics; Journal of Mechanics Based Design of Structures and Machines; and Shock and Vibration.

Authors:

Marcos Alipi University of Texas Rio Grande Valley
Dumitru Caruntu University Of Texas Rio Grande Valley